Rate control in dual source evaporation
نویسندگان
چکیده
منابع مشابه
Rate control in dual source evaporation
Two-component thin films are deposited in a high-vacuum system from two close sources, heated by an electron beam which is deflected between them. By using quartz-crystal monitors the evaporation rates are measured separately, which is usually considered to be problematical. One rate signal is used to regulate the appropriate deposition rate by controlling the emission current. The other deposi...
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An operator, called the dual-rate transfer function, describing a dual-rate discretized continuous-time system is presented. It can be easily related to single-rate transfer functions of the same system, and its parameters can be experimentally estimated. Based on these models, two adaptive control strategies are outlined, and some results are illustrated by a simple example. Copyright 0 1996 E...
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ژورنال
عنوان ژورنال: Journal of Physics E: Scientific Instruments
سال: 1980
ISSN: 0022-3735
DOI: 10.1088/0022-3735/13/2/014